¸ðµ¨¸í : Volume Chamber ; Dry Pump Test Chamber
Á¦ÀÛÀÏ : 2002. 11
Á¦ÀÛ»ç¾ç : 10-10 mbar*L/s ÀÌÇÏÀÇ ´©Ãâ·ü ³ôÀÌxÆøx±íÀÌ 1080x1760x1000 mm^3 Áß °íÁø°ø¿ë ´ë¿ë·® ÆßÇÁÀÇ ÆßÇÎ ´É·ÂÀ» ÃøÁ¤Çϱâ À§ÇÑ ´ëÇü è¹ö
³³Ç°Ã³ : Alcatel, BOC Edwards, K.C.Tech, Çѱ¹ Ebara Á¤¹Ð±â°è, LOT Vacuum